5/3/2012	12:16:02 AM	Helium valve closed
5/3/2012	12:16:02 AM	PH3 valve closed
5/3/2012	12:16:02 AM	Main Vac valve closed
5/3/2012	12:16:02 AM	Bypass valve closed
5/3/2012	12:16:02 AM	H2 valve opened
5/3/2012	12:16:02 AM	BCl3 valve opened
5/3/2012	12:16:02 AM	SiCl4 pre valve opened
5/3/2012	12:16:02 AM	SiCl4 post valve opened
5/3/2012	12:16:02 AM	Bubbler valve opened
5/3/2012	12:16:02 AM	Helium MFC set to  0.000000
5/3/2012	12:16:02 AM	H2 MFC set to  450.000000
5/3/2012	12:16:02 AM	BCl3 MFC set to  5.000000
5/3/2012	12:16:02 AM	PH3 MFC set to  0.000000
5/3/2012	12:16:02 AM	SiCl4 MFC set to  50.000000
5/3/2012	12:16:02 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:16:02 AM	Tube furnace set to 1000
5/3/2012	12:17:02 AM	Helium valve closed
5/3/2012	12:17:02 AM	PH3 valve closed
5/3/2012	12:17:02 AM	Main Vac valve closed
5/3/2012	12:17:02 AM	Bypass valve closed
5/3/2012	12:17:03 AM	H2 valve opened
5/3/2012	12:17:03 AM	BCl3 valve opened
5/3/2012	12:17:03 AM	SiCl4 pre valve opened
5/3/2012	12:17:03 AM	SiCl4 post valve opened
5/3/2012	12:17:03 AM	Bubbler valve opened
5/3/2012	12:17:03 AM	Helium MFC set to  0.000000
5/3/2012	12:17:03 AM	H2 MFC set to  450.000000
5/3/2012	12:17:03 AM	BCl3 MFC set to  0.750000
5/3/2012	12:17:03 AM	PH3 MFC set to  0.000000
5/3/2012	12:17:03 AM	SiCl4 MFC set to  50.000000
5/3/2012	12:17:03 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:17:03 AM	Tube furnace set to 1000
5/3/2012	12:41:03 AM	Helium valve closed
5/3/2012	12:41:03 AM	BCl3 valve closed
5/3/2012	12:41:03 AM	Main Vac valve closed
5/3/2012	12:41:03 AM	Bypass valve closed
5/3/2012	12:41:03 AM	H2 valve opened
5/3/2012	12:41:03 AM	PH3 valve opened
5/3/2012	12:41:03 AM	SiCl4 pre valve opened
5/3/2012	12:41:03 AM	SiCl4 post valve opened
5/3/2012	12:41:03 AM	Bubbler valve opened
5/3/2012	12:41:03 AM	Helium MFC set to  0.000000
5/3/2012	12:41:03 AM	H2 MFC set to  430.000000
5/3/2012	12:41:03 AM	BCl3 MFC set to  0.000000
5/3/2012	12:41:03 AM	PH3 MFC set to  20.000000
5/3/2012	12:41:03 AM	SiCl4 MFC set to  50.000000
5/3/2012	12:41:03 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:41:03 AM	Tube furnace set to 1000
5/3/2012	12:42:03 AM	Helium valve closed
5/3/2012	12:42:03 AM	BCl3 valve closed
5/3/2012	12:42:03 AM	PH3 valve closed
5/3/2012	12:42:03 AM	SiCl4 pre valve closed
5/3/2012	12:42:03 AM	SiCl4 post valve closed
5/3/2012	12:42:03 AM	Main Vac valve closed
5/3/2012	12:42:03 AM	Bypass valve closed
5/3/2012	12:42:03 AM	H2 valve opened
5/3/2012	12:42:03 AM	Bubbler valve opened
5/3/2012	12:42:03 AM	Helium MFC set to  0.000000
5/3/2012	12:42:03 AM	H2 MFC set to  500.000000
5/3/2012	12:42:03 AM	BCl3 MFC set to  0.000000
5/3/2012	12:42:03 AM	PH3 MFC set to  0.000000
5/3/2012	12:42:03 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:42:03 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:42:03 AM	Tube furnace set to 975
5/3/2012	12:43:33 AM	Helium valve closed
5/3/2012	12:43:33 AM	BCl3 valve closed
5/3/2012	12:43:33 AM	PH3 valve closed
5/3/2012	12:43:33 AM	SiCl4 pre valve closed
5/3/2012	12:43:33 AM	SiCl4 post valve closed
5/3/2012	12:43:33 AM	Main Vac valve closed
5/3/2012	12:43:33 AM	Bypass valve closed
5/3/2012	12:43:33 AM	H2 valve opened
5/3/2012	12:43:33 AM	Bubbler valve opened
5/3/2012	12:43:33 AM	Helium MFC set to  0.000000
5/3/2012	12:43:33 AM	H2 MFC set to  500.000000
5/3/2012	12:43:33 AM	BCl3 MFC set to  0.000000
5/3/2012	12:43:33 AM	PH3 MFC set to  0.000000
5/3/2012	12:43:33 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:43:33 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:43:34 AM	Tube furnace set to 950
5/3/2012	12:45:04 AM	Helium valve closed
5/3/2012	12:45:04 AM	BCl3 valve closed
5/3/2012	12:45:04 AM	PH3 valve closed
5/3/2012	12:45:04 AM	SiCl4 pre valve closed
5/3/2012	12:45:04 AM	SiCl4 post valve closed
5/3/2012	12:45:04 AM	Main Vac valve closed
5/3/2012	12:45:04 AM	Bypass valve closed
5/3/2012	12:45:04 AM	H2 valve opened
5/3/2012	12:45:04 AM	Bubbler valve opened
5/3/2012	12:45:04 AM	Helium MFC set to  0.000000
5/3/2012	12:45:04 AM	H2 MFC set to  500.000000
5/3/2012	12:45:04 AM	BCl3 MFC set to  0.000000
5/3/2012	12:45:04 AM	PH3 MFC set to  0.000000
5/3/2012	12:45:04 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:45:04 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:45:04 AM	Tube furnace set to 925
5/3/2012	12:46:34 AM	Helium valve closed
5/3/2012	12:46:34 AM	BCl3 valve closed
5/3/2012	12:46:34 AM	PH3 valve closed
5/3/2012	12:46:34 AM	SiCl4 pre valve closed
5/3/2012	12:46:34 AM	SiCl4 post valve closed
5/3/2012	12:46:34 AM	Main Vac valve closed
5/3/2012	12:46:34 AM	Bypass valve closed
5/3/2012	12:46:34 AM	H2 valve opened
5/3/2012	12:46:34 AM	Bubbler valve opened
5/3/2012	12:46:34 AM	Helium MFC set to  0.000000
5/3/2012	12:46:34 AM	H2 MFC set to  500.000000
5/3/2012	12:46:34 AM	BCl3 MFC set to  0.000000
5/3/2012	12:46:34 AM	PH3 MFC set to  0.000000
5/3/2012	12:46:34 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:46:34 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:46:34 AM	Tube furnace set to 900
5/3/2012	12:48:04 AM	H2 valve closed
5/3/2012	12:48:04 AM	BCl3 valve closed
5/3/2012	12:48:04 AM	PH3 valve closed
5/3/2012	12:48:04 AM	SiCl4 pre valve closed
5/3/2012	12:48:04 AM	SiCl4 post valve closed
5/3/2012	12:48:04 AM	Main Vac valve closed
5/3/2012	12:48:04 AM	Bypass valve closed
5/3/2012	12:48:04 AM	Helium valve opened
5/3/2012	12:48:04 AM	Bubbler valve opened
5/3/2012	12:48:04 AM	Helium MFC set to  500.000000
5/3/2012	12:48:04 AM	H2 MFC set to  0.000000
5/3/2012	12:48:04 AM	BCl3 MFC set to  0.000000
5/3/2012	12:48:04 AM	PH3 MFC set to  0.000000
5/3/2012	12:48:04 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:48:04 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:48:04 AM	Tube furnace set to 875
5/3/2012	12:49:34 AM	H2 valve closed
5/3/2012	12:49:34 AM	BCl3 valve closed
5/3/2012	12:49:34 AM	PH3 valve closed
5/3/2012	12:49:34 AM	SiCl4 pre valve closed
5/3/2012	12:49:34 AM	SiCl4 post valve closed
5/3/2012	12:49:34 AM	Main Vac valve closed
5/3/2012	12:49:34 AM	Bypass valve closed
5/3/2012	12:49:34 AM	Helium valve opened
5/3/2012	12:49:34 AM	Bubbler valve opened
5/3/2012	12:49:34 AM	Helium MFC set to  500.000000
5/3/2012	12:49:34 AM	H2 MFC set to  0.000000
5/3/2012	12:49:34 AM	BCl3 MFC set to  0.000000
5/3/2012	12:49:34 AM	PH3 MFC set to  0.000000
5/3/2012	12:49:34 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:49:34 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:49:35 AM	Tube furnace set to 850
5/3/2012	12:51:05 AM	H2 valve closed
5/3/2012	12:51:05 AM	BCl3 valve closed
5/3/2012	12:51:05 AM	PH3 valve closed
5/3/2012	12:51:05 AM	SiCl4 pre valve closed
5/3/2012	12:51:05 AM	SiCl4 post valve closed
5/3/2012	12:51:05 AM	Main Vac valve closed
5/3/2012	12:51:05 AM	Bypass valve closed
5/3/2012	12:51:05 AM	Helium valve opened
5/3/2012	12:51:05 AM	Bubbler valve opened
5/3/2012	12:51:05 AM	Helium MFC set to  500.000000
5/3/2012	12:51:05 AM	H2 MFC set to  0.000000
5/3/2012	12:51:05 AM	BCl3 MFC set to  0.000000
5/3/2012	12:51:05 AM	PH3 MFC set to  0.000000
5/3/2012	12:51:05 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:51:05 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:51:05 AM	Tube furnace set to 825
5/3/2012	12:52:35 AM	H2 valve closed
5/3/2012	12:52:35 AM	BCl3 valve closed
5/3/2012	12:52:35 AM	PH3 valve closed
5/3/2012	12:52:35 AM	SiCl4 pre valve closed
5/3/2012	12:52:35 AM	SiCl4 post valve closed
5/3/2012	12:52:35 AM	Main Vac valve closed
5/3/2012	12:52:35 AM	Bypass valve closed
5/3/2012	12:52:35 AM	Helium valve opened
5/3/2012	12:52:35 AM	Bubbler valve opened
5/3/2012	12:52:35 AM	Helium MFC set to  500.000000
5/3/2012	12:52:35 AM	H2 MFC set to  0.000000
5/3/2012	12:52:35 AM	BCl3 MFC set to  0.000000
5/3/2012	12:52:35 AM	PH3 MFC set to  0.000000
5/3/2012	12:52:35 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:52:35 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:52:35 AM	Tube furnace set to 800
5/3/2012	12:54:05 AM	H2 valve closed
5/3/2012	12:54:05 AM	BCl3 valve closed
5/3/2012	12:54:05 AM	PH3 valve closed
5/3/2012	12:54:05 AM	SiCl4 pre valve closed
5/3/2012	12:54:05 AM	SiCl4 post valve closed
5/3/2012	12:54:05 AM	Main Vac valve closed
5/3/2012	12:54:05 AM	Bypass valve closed
5/3/2012	12:54:05 AM	Helium valve opened
5/3/2012	12:54:05 AM	Bubbler valve opened
5/3/2012	12:54:05 AM	Helium MFC set to  500.000000
5/3/2012	12:54:05 AM	H2 MFC set to  0.000000
5/3/2012	12:54:05 AM	BCl3 MFC set to  0.000000
5/3/2012	12:54:05 AM	PH3 MFC set to  0.000000
5/3/2012	12:54:05 AM	SiCl4 MFC set to  0.000000
5/3/2012	12:54:05 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:54:05 AM	Tube furnace set to 0
5/3/2012	1:09:05 AM	Helium valve closed
5/3/2012	1:09:05 AM	H2 valve closed
5/3/2012	1:09:05 AM	BCl3 valve closed
5/3/2012	1:09:05 AM	PH3 valve closed
5/3/2012	1:09:05 AM	SiCl4 pre valve closed
5/3/2012	1:09:05 AM	SiCl4 post valve closed
5/3/2012	1:09:05 AM	Main Vac valve closed
5/3/2012	1:09:05 AM	Bypass valve closed
5/3/2012	1:09:06 AM	Bubbler valve closed
5/3/2012	1:09:06 AM	Helium MFC set to  0.000000
5/3/2012	1:09:06 AM	H2 MFC set to  0.000000
5/3/2012	1:09:06 AM	BCl3 MFC set to  0.000000
5/3/2012	1:09:06 AM	PH3 MFC set to  0.000000
5/3/2012	1:09:06 AM	SiCl4 MFC set to  0.000000
5/3/2012	1:09:06 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	1:09:06 AM	Tube furnace set to 0
5/3/2012	1:39:06 AM	H2 valve closed
5/3/2012	1:39:06 AM	BCl3 valve closed
5/3/2012	1:39:06 AM	PH3 valve closed
5/3/2012	1:39:06 AM	SiCl4 pre valve closed
5/3/2012	1:39:06 AM	SiCl4 post valve closed
5/3/2012	1:39:06 AM	Main Vac valve closed
5/3/2012	1:39:06 AM	Bypass valve closed
5/3/2012	1:39:06 AM	Bubbler valve closed
5/3/2012	1:39:06 AM	Helium valve opened
5/3/2012	1:39:06 AM	Helium MFC set to  500.000000
5/3/2012	1:39:06 AM	H2 MFC set to  0.000000
5/3/2012	1:39:06 AM	BCl3 MFC set to  0.000000
5/3/2012	1:39:06 AM	PH3 MFC set to  0.000000
5/3/2012	1:39:06 AM	SiCl4 MFC set to  0.000000
5/3/2012	1:39:06 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	1:39:06 AM	Tube furnace set to 0
5/3/2012	1:39:10 AM	H2 valve closed
5/3/2012	1:39:10 AM	BCl3 valve closed
5/3/2012	1:39:10 AM	PH3 valve closed
5/3/2012	1:39:10 AM	SiCl4 pre valve closed
5/3/2012	1:39:10 AM	SiCl4 post valve closed
5/3/2012	1:39:10 AM	Main Vac valve closed
5/3/2012	1:39:10 AM	Bypass valve closed
5/3/2012	1:39:10 AM	Helium valve opened
5/3/2012	1:39:10 AM	Bubbler valve opened
5/3/2012	1:39:10 AM	Helium MFC set to  500.000000
5/3/2012	1:39:10 AM	H2 MFC set to  0.000000
5/3/2012	1:39:10 AM	BCl3 MFC set to  0.000000
5/3/2012	1:39:10 AM	PH3 MFC set to  0.000000
5/3/2012	1:39:10 AM	SiCl4 MFC set to  0.000000
5/3/2012	1:39:10 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	1:39:10 AM	Tube furnace set to 0
5/3/2012	1:41:10 AM	Helium valve closed
5/3/2012	1:41:10 AM	H2 valve closed
5/3/2012	1:41:10 AM	BCl3 valve closed
5/3/2012	1:41:10 AM	PH3 valve closed
5/3/2012	1:41:10 AM	SiCl4 pre valve closed
5/3/2012	1:41:10 AM	SiCl4 post valve closed
5/3/2012	1:41:10 AM	Main Vac valve closed
5/3/2012	1:41:10 AM	Bypass valve closed
5/3/2012	1:41:10 AM	Bubbler valve closed
5/3/2012	1:41:10 AM	Helium MFC set to  0.000000
5/3/2012	1:41:10 AM	H2 MFC set to  0.000000
5/3/2012	1:41:10 AM	BCl3 MFC set to  0.000000
5/3/2012	1:41:10 AM	PH3 MFC set to  0.000000
5/3/2012	1:41:10 AM	SiCl4 MFC set to  0.000000
5/3/2012	1:41:10 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	1:41:10 AM	Tube furnace set to 0
5/3/2012	1:41:11 AM	Helium valve closed
5/3/2012	1:41:12 AM	H2 valve closed
5/3/2012	1:41:12 AM	BCl3 valve closed
5/3/2012	1:41:12 AM	PH3 valve closed
5/3/2012	1:41:12 AM	SiCl4 pre valve closed
5/3/2012	1:41:12 AM	SiCl4 post valve closed
5/3/2012	1:41:12 AM	Main Vac valve closed
5/3/2012	1:41:12 AM	Bubbler valve closed
5/3/2012	1:41:12 AM	Bypass valve opened
5/3/2012	1:41:12 AM	Helium MFC set to  0.000000
5/3/2012	1:41:12 AM	H2 MFC set to  0.000000
5/3/2012	1:41:12 AM	BCl3 MFC set to  0.000000
5/3/2012	1:41:12 AM	PH3 MFC set to  0.000000
5/3/2012	1:41:12 AM	SiCl4 MFC set to  0.000000
5/3/2012	1:41:12 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	1:41:12 AM	Tube furnace set to 0
5/3/2012	1:42:03 AM	Helium valve closed
5/3/2012	1:42:03 AM	H2 valve closed
5/3/2012	1:42:03 AM	BCl3 valve closed
5/3/2012	1:42:03 AM	PH3 valve closed
5/3/2012	1:42:03 AM	SiCl4 pre valve closed
5/3/2012	1:42:03 AM	SiCl4 post valve closed
5/3/2012	1:42:03 AM	Main Vac valve closed
5/3/2012	1:42:03 AM	Bubbler valve closed
5/3/2012	1:42:03 AM	Bypass valve opened
5/3/2012	1:42:03 AM	Helium MFC set to  0.000000
5/3/2012	1:42:03 AM	H2 MFC set to  0.000000
5/3/2012	1:42:03 AM	BCl3 MFC set to  0.000000
5/3/2012	1:42:03 AM	PH3 MFC set to  0.000000
5/3/2012	1:42:03 AM	SiCl4 MFC set to  0.000000
5/3/2012	1:42:03 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	1:42:04 AM	Tube furnace set to 0
5/3/2012	1:43:04 AM	Helium valve closed
5/3/2012	1:43:04 AM	H2 valve closed
5/3/2012	1:43:04 AM	BCl3 valve closed
5/3/2012	1:43:04 AM	PH3 valve closed
5/3/2012	1:43:04 AM	SiCl4 pre valve closed
5/3/2012	1:43:04 AM	SiCl4 post valve closed
5/3/2012	1:43:04 AM	Bypass valve closed
5/3/2012	1:43:04 AM	Bubbler valve closed
5/3/2012	1:43:04 AM	Main Vac valve opened
5/3/2012	1:43:04 AM	Helium MFC set to  0.000000
5/3/2012	1:43:04 AM	H2 MFC set to  0.000000
5/3/2012	1:43:04 AM	BCl3 MFC set to  0.000000
5/3/2012	1:43:04 AM	PH3 MFC set to  0.000000
5/3/2012	1:43:04 AM	SiCl4 MFC set to  0.000000
5/3/2012	1:43:04 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	1:43:04 AM	Tube furnace set to 0
5/3/2012	4:23:04 AM	Run finished at 4:23 AM
5/3/2012	9:03:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2012	9:03:06 AM	Recipe started at 9:03 AM
5/3/2012	9:03:06 AM	Helium valve closed
5/3/2012	9:03:06 AM	H2 valve closed
5/3/2012	9:03:06 AM	BCl3 valve closed
5/3/2012	9:03:07 AM	PH3 valve closed
5/3/2012	9:03:07 AM	SiCl4 pre valve closed
5/3/2012	9:03:07 AM	SiCl4 post valve closed
5/3/2012	9:03:07 AM	Main Vac valve closed
5/3/2012	9:03:07 AM	Bypass valve closed
5/3/2012	9:03:07 AM	Bubbler valve closed
5/3/2012	9:03:07 AM	Helium MFC set to  0.000000
5/3/2012	9:03:07 AM	H2 MFC set to  0.000000
5/3/2012	9:03:07 AM	BCl3 MFC set to  0.000000
5/3/2012	9:03:07 AM	PH3 MFC set to  0.000000
5/3/2012	9:03:07 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:03:07 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:03:07 AM	Tube furnace set to 0
5/3/2012	9:03:10 AM	H2 valve closed
5/3/2012	9:03:10 AM	BCl3 valve closed
5/3/2012	9:03:10 AM	PH3 valve closed
5/3/2012	9:03:10 AM	SiCl4 pre valve closed
5/3/2012	9:03:10 AM	SiCl4 post valve closed
5/3/2012	9:03:10 AM	Main Vac valve closed
5/3/2012	9:03:10 AM	Bypass valve closed
5/3/2012	9:03:10 AM	Bubbler valve closed
5/3/2012	9:03:10 AM	Helium valve opened
5/3/2012	9:03:10 AM	Helium MFC set to  500.000000
5/3/2012	9:03:10 AM	H2 MFC set to  0.000000
5/3/2012	9:03:10 AM	BCl3 MFC set to  0.000000
5/3/2012	9:03:10 AM	PH3 MFC set to  0.000000
5/3/2012	9:03:10 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:03:10 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:03:10 AM	Tube furnace set to 0
5/3/2012	9:04:23 AM	Helium valve closed
5/3/2012	9:04:23 AM	H2 valve closed
5/3/2012	9:04:23 AM	BCl3 valve closed
5/3/2012	9:04:23 AM	PH3 valve closed
5/3/2012	9:04:23 AM	SiCl4 pre valve closed
5/3/2012	9:04:23 AM	SiCl4 post valve closed
5/3/2012	9:04:23 AM	Main Vac valve closed
5/3/2012	9:04:23 AM	Bypass valve closed
5/3/2012	9:04:23 AM	Bubbler valve closed
5/3/2012	9:04:23 AM	Helium MFC set to  0.000000
5/3/2012	9:04:23 AM	H2 MFC set to  0.000000
5/3/2012	9:04:23 AM	BCl3 MFC set to  0.000000
5/3/2012	9:04:23 AM	PH3 MFC set to  0.000000
5/3/2012	9:04:23 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:04:23 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:04:23 AM	Tube furnace set to 0
5/3/2012	9:04:24 AM	Run finished at 9:04 AM
5/3/2012	9:04:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2012	9:17:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2012	9:17:30 AM	Recipe started at 9:17 AM
5/3/2012	9:17:30 AM	Helium valve closed
5/3/2012	9:17:30 AM	H2 valve closed
5/3/2012	9:17:30 AM	BCl3 valve closed
5/3/2012	9:17:31 AM	PH3 valve closed
5/3/2012	9:17:31 AM	SiCl4 pre valve closed
5/3/2012	9:17:31 AM	SiCl4 post valve closed
5/3/2012	9:17:31 AM	Main Vac valve closed
5/3/2012	9:17:31 AM	Bubbler valve closed
5/3/2012	9:17:31 AM	Bypass valve opened
5/3/2012	9:17:31 AM	Helium MFC set to  0.000000
5/3/2012	9:17:31 AM	H2 MFC set to  0.000000
5/3/2012	9:17:31 AM	BCl3 MFC set to  0.000000
5/3/2012	9:17:31 AM	PH3 MFC set to  0.000000
5/3/2012	9:17:31 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:17:31 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:17:31 AM	Tube furnace set to 0
5/3/2012	9:18:43 AM	Helium valve closed
5/3/2012	9:18:43 AM	H2 valve closed
5/3/2012	9:18:43 AM	BCl3 valve closed
5/3/2012	9:18:43 AM	PH3 valve closed
5/3/2012	9:18:43 AM	SiCl4 pre valve closed
5/3/2012	9:18:43 AM	SiCl4 post valve closed
5/3/2012	9:18:43 AM	Main Vac valve closed
5/3/2012	9:18:43 AM	Bubbler valve closed
5/3/2012	9:18:43 AM	Bypass valve opened
5/3/2012	9:18:43 AM	Helium MFC set to  0.000000
5/3/2012	9:18:43 AM	H2 MFC set to  0.000000
5/3/2012	9:18:43 AM	BCl3 MFC set to  0.000000
5/3/2012	9:18:43 AM	PH3 MFC set to  0.000000
5/3/2012	9:18:43 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:18:43 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:18:43 AM	Tube furnace set to 0
5/3/2012	9:19:43 AM	Helium valve closed
5/3/2012	9:19:43 AM	H2 valve closed
5/3/2012	9:19:43 AM	BCl3 valve closed
5/3/2012	9:19:43 AM	PH3 valve closed
5/3/2012	9:19:43 AM	SiCl4 pre valve closed
5/3/2012	9:19:43 AM	SiCl4 post valve closed
5/3/2012	9:19:43 AM	Bypass valve closed
5/3/2012	9:19:43 AM	Bubbler valve closed
5/3/2012	9:19:43 AM	Main Vac valve opened
5/3/2012	9:19:43 AM	Helium MFC set to  0.000000
5/3/2012	9:19:43 AM	H2 MFC set to  0.000000
5/3/2012	9:19:43 AM	BCl3 MFC set to  0.000000
5/3/2012	9:19:43 AM	PH3 MFC set to  0.000000
5/3/2012	9:19:43 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:19:43 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:19:44 AM	Tube furnace set to 0
5/3/2012	9:19:45 AM	Run finished at 9:19 AM
5/3/2012	9:19:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2012	9:21:27 AM	Recipe started at 9:21 AM
5/3/2012	9:21:27 AM	H2 valve closed
5/3/2012	9:21:27 AM	BCl3 valve closed
5/3/2012	9:21:27 AM	PH3 valve closed
5/3/2012	9:21:27 AM	SiCl4 pre valve closed
5/3/2012	9:21:27 AM	SiCl4 post valve closed
5/3/2012	9:21:27 AM	Main Vac valve closed
5/3/2012	9:21:27 AM	Bypass valve closed
5/3/2012	9:21:27 AM	Bubbler valve closed
5/3/2012	9:21:27 AM	Helium valve opened
5/3/2012	9:21:27 AM	Helium MFC set to  500.000000
5/3/2012	9:21:27 AM	H2 MFC set to  0.000000
5/3/2012	9:21:27 AM	BCl3 MFC set to  0.000000
5/3/2012	9:21:27 AM	PH3 MFC set to  0.000000
5/3/2012	9:21:27 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:21:27 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:21:27 AM	Tube furnace set to 180
5/3/2012	9:22:44 AM	H2 valve closed
5/3/2012	9:22:44 AM	BCl3 valve closed
5/3/2012	9:22:44 AM	PH3 valve closed
5/3/2012	9:22:44 AM	SiCl4 pre valve closed
5/3/2012	9:22:44 AM	SiCl4 post valve closed
5/3/2012	9:22:44 AM	Main Vac valve closed
5/3/2012	9:22:44 AM	Bypass valve closed
5/3/2012	9:22:44 AM	Helium valve opened
5/3/2012	9:22:44 AM	Bubbler valve opened
5/3/2012	9:22:44 AM	Helium MFC set to  500.000000
5/3/2012	9:22:44 AM	H2 MFC set to  0.000000
5/3/2012	9:22:44 AM	BCl3 MFC set to  0.000000
5/3/2012	9:22:44 AM	PH3 MFC set to  0.000000
5/3/2012	9:22:44 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:22:44 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:22:44 AM	Tube furnace set to 180
5/3/2012	9:23:44 AM	Helium valve closed
5/3/2012	9:23:44 AM	H2 valve closed
5/3/2012	9:23:44 AM	BCl3 valve closed
5/3/2012	9:23:44 AM	PH3 valve closed
5/3/2012	9:23:44 AM	SiCl4 pre valve closed
5/3/2012	9:23:44 AM	SiCl4 post valve closed
5/3/2012	9:23:44 AM	Main Vac valve closed
5/3/2012	9:23:44 AM	Bubbler valve closed
5/3/2012	9:23:44 AM	Bypass valve opened
5/3/2012	9:23:44 AM	Helium MFC set to  0.000000
5/3/2012	9:23:44 AM	H2 MFC set to  0.000000
5/3/2012	9:23:44 AM	BCl3 MFC set to  0.000000
5/3/2012	9:23:44 AM	PH3 MFC set to  0.000000
5/3/2012	9:23:44 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:23:44 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:23:44 AM	Tube furnace set to 180
5/3/2012	9:24:39 AM	Helium valve closed
5/3/2012	9:24:39 AM	H2 valve closed
5/3/2012	9:24:39 AM	BCl3 valve closed
5/3/2012	9:24:39 AM	PH3 valve closed
5/3/2012	9:24:39 AM	SiCl4 pre valve closed
5/3/2012	9:24:39 AM	SiCl4 post valve closed
5/3/2012	9:24:39 AM	Main Vac valve closed
5/3/2012	9:24:39 AM	Bubbler valve closed
5/3/2012	9:24:39 AM	Bypass valve opened
5/3/2012	9:24:39 AM	Helium MFC set to  0.000000
5/3/2012	9:24:39 AM	H2 MFC set to  0.000000
5/3/2012	9:24:39 AM	BCl3 MFC set to  0.000000
5/3/2012	9:24:39 AM	PH3 MFC set to  0.000000
5/3/2012	9:24:39 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:24:39 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:24:39 AM	Tube furnace set to 180
5/3/2012	9:25:39 AM	Helium valve closed
5/3/2012	9:25:39 AM	H2 valve closed
5/3/2012	9:25:39 AM	BCl3 valve closed
5/3/2012	9:25:39 AM	PH3 valve closed
5/3/2012	9:25:39 AM	SiCl4 pre valve closed
5/3/2012	9:25:39 AM	SiCl4 post valve closed
5/3/2012	9:25:39 AM	Bypass valve closed
5/3/2012	9:25:39 AM	Bubbler valve closed
5/3/2012	9:25:39 AM	Main Vac valve opened
5/3/2012	9:25:39 AM	Helium MFC set to  0.000000
5/3/2012	9:25:39 AM	H2 MFC set to  0.000000
5/3/2012	9:25:39 AM	BCl3 MFC set to  0.000000
5/3/2012	9:25:39 AM	PH3 MFC set to  0.000000
5/3/2012	9:25:39 AM	SiCl4 MFC set to  0.000000
5/3/2012	9:25:39 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	9:25:39 AM	Tube furnace set to 180
5/3/2012	10:55:40 AM	H2 valve closed
5/3/2012	10:55:40 AM	BCl3 valve closed
5/3/2012	10:55:40 AM	PH3 valve closed
5/3/2012	10:55:40 AM	SiCl4 pre valve closed
5/3/2012	10:55:40 AM	SiCl4 post valve closed
5/3/2012	10:55:40 AM	Bypass valve closed
5/3/2012	10:55:40 AM	Bubbler valve closed
5/3/2012	10:55:40 AM	Helium valve opened
5/3/2012	10:55:40 AM	Main Vac valve opened
5/3/2012	10:55:40 AM	Helium MFC set to  10.000000
5/3/2012	10:55:40 AM	H2 MFC set to  0.000000
5/3/2012	10:55:40 AM	BCl3 MFC set to  0.000000
5/3/2012	10:55:40 AM	PH3 MFC set to  0.000000
5/3/2012	10:55:40 AM	SiCl4 MFC set to  0.000000
5/3/2012	10:55:40 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	10:55:40 AM	Tube furnace set to 180
5/3/2012	10:56:10 AM	Helium valve closed
5/3/2012	10:56:10 AM	H2 valve closed
5/3/2012	10:56:10 AM	BCl3 valve closed
5/3/2012	10:56:10 AM	PH3 valve closed
5/3/2012	10:56:10 AM	SiCl4 pre valve closed
5/3/2012	10:56:10 AM	SiCl4 post valve closed
5/3/2012	10:56:10 AM	Bypass valve closed
5/3/2012	10:56:10 AM	Bubbler valve closed
5/3/2012	10:56:10 AM	Main Vac valve opened
5/3/2012	10:56:10 AM	Helium MFC set to  0.000000
5/3/2012	10:56:10 AM	H2 MFC set to  0.000000
5/3/2012	10:56:10 AM	BCl3 MFC set to  0.000000
5/3/2012	10:56:10 AM	PH3 MFC set to  0.000000
5/3/2012	10:56:10 AM	SiCl4 MFC set to  0.000000
5/3/2012	10:56:10 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	10:56:10 AM	Tube furnace set to 180
5/3/2012	10:56:40 AM	H2 valve closed
5/3/2012	10:56:40 AM	BCl3 valve closed
5/3/2012	10:56:40 AM	PH3 valve closed
5/3/2012	10:56:40 AM	SiCl4 pre valve closed
5/3/2012	10:56:40 AM	SiCl4 post valve closed
5/3/2012	10:56:40 AM	Bypass valve closed
5/3/2012	10:56:40 AM	Bubbler valve closed
5/3/2012	10:56:40 AM	Helium valve opened
5/3/2012	10:56:40 AM	Main Vac valve opened
5/3/2012	10:56:40 AM	Helium MFC set to  10.000000
5/3/2012	10:56:40 AM	H2 MFC set to  0.000000
5/3/2012	10:56:40 AM	BCl3 MFC set to  0.000000
5/3/2012	10:56:40 AM	PH3 MFC set to  0.000000
5/3/2012	10:56:40 AM	SiCl4 MFC set to  0.000000
5/3/2012	10:56:40 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	10:56:40 AM	Tube furnace set to 180
5/3/2012	10:57:10 AM	Helium valve closed
5/3/2012	10:57:10 AM	H2 valve closed
5/3/2012	10:57:10 AM	BCl3 valve closed
5/3/2012	10:57:10 AM	PH3 valve closed
5/3/2012	10:57:10 AM	SiCl4 pre valve closed
5/3/2012	10:57:10 AM	SiCl4 post valve closed
5/3/2012	10:57:10 AM	Bypass valve closed
5/3/2012	10:57:10 AM	Bubbler valve closed
5/3/2012	10:57:10 AM	Main Vac valve opened
5/3/2012	10:57:10 AM	Helium MFC set to  0.000000
5/3/2012	10:57:10 AM	H2 MFC set to  0.000000
5/3/2012	10:57:10 AM	BCl3 MFC set to  0.000000
5/3/2012	10:57:10 AM	PH3 MFC set to  0.000000
5/3/2012	10:57:10 AM	SiCl4 MFC set to  0.000000
5/3/2012	10:57:11 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	10:57:11 AM	Tube furnace set to 180
5/3/2012	10:59:11 AM	Helium valve closed
5/3/2012	10:59:11 AM	BCl3 valve closed
5/3/2012	10:59:11 AM	PH3 valve closed
5/3/2012	10:59:11 AM	SiCl4 pre valve closed
5/3/2012	10:59:11 AM	SiCl4 post valve closed
5/3/2012	10:59:11 AM	Main Vac valve closed
5/3/2012	10:59:11 AM	Bypass valve closed
5/3/2012	10:59:11 AM	Bubbler valve closed
5/3/2012	10:59:11 AM	H2 valve opened
5/3/2012	10:59:11 AM	Helium MFC set to  0.000000
5/3/2012	10:59:11 AM	H2 MFC set to  500.000000
5/3/2012	10:59:11 AM	BCl3 MFC set to  0.000000
5/3/2012	10:59:11 AM	PH3 MFC set to  0.000000
5/3/2012	10:59:11 AM	SiCl4 MFC set to  0.000000
5/3/2012	10:59:11 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	10:59:11 AM	Tube furnace set to 1000
5/3/2012	11:00:23 AM	Helium valve closed
5/3/2012	11:00:23 AM	BCl3 valve closed
5/3/2012	11:00:23 AM	PH3 valve closed
5/3/2012	11:00:23 AM	SiCl4 pre valve closed
5/3/2012	11:00:23 AM	SiCl4 post valve closed
5/3/2012	11:00:23 AM	Main Vac valve closed
5/3/2012	11:00:23 AM	Bypass valve closed
5/3/2012	11:00:23 AM	H2 valve opened
5/3/2012	11:00:23 AM	Bubbler valve opened
5/3/2012	11:00:23 AM	Helium MFC set to  0.000000
5/3/2012	11:00:23 AM	H2 MFC set to  500.000000
5/3/2012	11:00:23 AM	BCl3 MFC set to  0.000000
5/3/2012	11:00:23 AM	PH3 MFC set to  0.000000
5/3/2012	11:00:23 AM	SiCl4 MFC set to  0.000000
5/3/2012	11:00:23 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:00:23 AM	Tube furnace set to 1000
5/3/2012	11:25:23 AM	Helium valve closed
5/3/2012	11:25:23 AM	PH3 valve closed
5/3/2012	11:25:23 AM	Main Vac valve closed
5/3/2012	11:25:23 AM	Bypass valve closed
5/3/2012	11:25:23 AM	H2 valve opened
5/3/2012	11:25:23 AM	BCl3 valve opened
5/3/2012	11:25:23 AM	SiCl4 pre valve opened
5/3/2012	11:25:23 AM	SiCl4 post valve opened
5/3/2012	11:25:23 AM	Bubbler valve opened
5/3/2012	11:25:23 AM	Helium MFC set to  0.000000
5/3/2012	11:25:23 AM	H2 MFC set to  450.000000
5/3/2012	11:25:23 AM	BCl3 MFC set to  5.000000
5/3/2012	11:25:23 AM	PH3 MFC set to  0.000000
5/3/2012	11:25:23 AM	SiCl4 MFC set to  50.000000
5/3/2012	11:25:23 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:25:23 AM	Tube furnace set to 1000
5/3/2012	11:26:23 AM	Helium valve closed
5/3/2012	11:26:23 AM	PH3 valve closed
5/3/2012	11:26:23 AM	Main Vac valve closed
5/3/2012	11:26:23 AM	Bypass valve closed
5/3/2012	11:26:23 AM	H2 valve opened
5/3/2012	11:26:23 AM	BCl3 valve opened
5/3/2012	11:26:23 AM	SiCl4 pre valve opened
5/3/2012	11:26:23 AM	SiCl4 post valve opened
5/3/2012	11:26:23 AM	Bubbler valve opened
5/3/2012	11:26:23 AM	Helium MFC set to  0.000000
5/3/2012	11:26:23 AM	H2 MFC set to  450.000000
5/3/2012	11:26:23 AM	BCl3 MFC set to  0.750000
5/3/2012	11:26:23 AM	PH3 MFC set to  0.000000
5/3/2012	11:26:23 AM	SiCl4 MFC set to  50.000000
5/3/2012	11:26:23 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:26:23 AM	Tube furnace set to 1000
5/3/2012	11:50:23 AM	Helium valve closed
5/3/2012	11:50:23 AM	BCl3 valve closed
5/3/2012	11:50:23 AM	Main Vac valve closed
5/3/2012	11:50:23 AM	Bypass valve closed
5/3/2012	11:50:23 AM	H2 valve opened
5/3/2012	11:50:23 AM	PH3 valve opened
5/3/2012	11:50:23 AM	SiCl4 pre valve opened
5/3/2012	11:50:23 AM	SiCl4 post valve opened
5/3/2012	11:50:24 AM	Bubbler valve opened
5/3/2012	11:50:24 AM	Helium MFC set to  0.000000
5/3/2012	11:50:24 AM	H2 MFC set to  430.000000
5/3/2012	11:50:24 AM	BCl3 MFC set to  0.000000
5/3/2012	11:50:24 AM	PH3 MFC set to  20.000000
5/3/2012	11:50:24 AM	SiCl4 MFC set to  50.000000
5/3/2012	11:50:24 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:50:24 AM	Tube furnace set to 1000
5/3/2012	11:51:24 AM	Helium valve closed
5/3/2012	11:51:24 AM	BCl3 valve closed
5/3/2012	11:51:24 AM	PH3 valve closed
5/3/2012	11:51:24 AM	SiCl4 pre valve closed
5/3/2012	11:51:24 AM	SiCl4 post valve closed
5/3/2012	11:51:24 AM	Main Vac valve closed
5/3/2012	11:51:24 AM	Bypass valve closed
5/3/2012	11:51:24 AM	H2 valve opened
5/3/2012	11:51:24 AM	Bubbler valve opened
5/3/2012	11:51:24 AM	Helium MFC set to  0.000000
5/3/2012	11:51:24 AM	H2 MFC set to  500.000000
5/3/2012	11:51:24 AM	BCl3 MFC set to  0.000000
5/3/2012	11:51:24 AM	PH3 MFC set to  0.000000
5/3/2012	11:51:24 AM	SiCl4 MFC set to  0.000000
5/3/2012	11:51:24 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:51:24 AM	Tube furnace set to 975
5/3/2012	11:52:54 AM	Helium valve closed
5/3/2012	11:52:54 AM	BCl3 valve closed
5/3/2012	11:52:54 AM	PH3 valve closed
5/3/2012	11:52:54 AM	SiCl4 pre valve closed
5/3/2012	11:52:54 AM	SiCl4 post valve closed
5/3/2012	11:52:54 AM	Main Vac valve closed
5/3/2012	11:52:54 AM	Bypass valve closed
5/3/2012	11:52:54 AM	H2 valve opened
5/3/2012	11:52:54 AM	Bubbler valve opened
5/3/2012	11:52:54 AM	Helium MFC set to  0.000000
5/3/2012	11:52:54 AM	H2 MFC set to  500.000000
5/3/2012	11:52:54 AM	BCl3 MFC set to  0.000000
5/3/2012	11:52:54 AM	PH3 MFC set to  0.000000
5/3/2012	11:52:54 AM	SiCl4 MFC set to  0.000000
5/3/2012	11:52:54 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:52:54 AM	Tube furnace set to 950
5/3/2012	11:54:24 AM	Helium valve closed
5/3/2012	11:54:24 AM	BCl3 valve closed
5/3/2012	11:54:24 AM	PH3 valve closed
5/3/2012	11:54:24 AM	SiCl4 pre valve closed
5/3/2012	11:54:24 AM	SiCl4 post valve closed
5/3/2012	11:54:24 AM	Main Vac valve closed
5/3/2012	11:54:24 AM	Bypass valve closed
5/3/2012	11:54:24 AM	H2 valve opened
5/3/2012	11:54:24 AM	Bubbler valve opened
5/3/2012	11:54:24 AM	Helium MFC set to  0.000000
5/3/2012	11:54:24 AM	H2 MFC set to  500.000000
5/3/2012	11:54:24 AM	BCl3 MFC set to  0.000000
5/3/2012	11:54:24 AM	PH3 MFC set to  0.000000
5/3/2012	11:54:24 AM	SiCl4 MFC set to  0.000000
5/3/2012	11:54:24 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:54:25 AM	Tube furnace set to 925
5/3/2012	11:55:55 AM	Helium valve closed
5/3/2012	11:55:55 AM	BCl3 valve closed
5/3/2012	11:55:55 AM	PH3 valve closed
5/3/2012	11:55:55 AM	SiCl4 pre valve closed
5/3/2012	11:55:55 AM	SiCl4 post valve closed
5/3/2012	11:55:55 AM	Main Vac valve closed
5/3/2012	11:55:55 AM	Bypass valve closed
5/3/2012	11:55:55 AM	H2 valve opened
5/3/2012	11:55:55 AM	Bubbler valve opened
5/3/2012	11:55:55 AM	Helium MFC set to  0.000000
5/3/2012	11:55:55 AM	H2 MFC set to  500.000000
5/3/2012	11:55:55 AM	BCl3 MFC set to  0.000000
5/3/2012	11:55:55 AM	PH3 MFC set to  0.000000
5/3/2012	11:55:55 AM	SiCl4 MFC set to  0.000000
5/3/2012	11:55:55 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:55:55 AM	Tube furnace set to 900
5/3/2012	11:57:25 AM	H2 valve closed
5/3/2012	11:57:25 AM	BCl3 valve closed
5/3/2012	11:57:25 AM	PH3 valve closed
5/3/2012	11:57:25 AM	SiCl4 pre valve closed
5/3/2012	11:57:25 AM	SiCl4 post valve closed
5/3/2012	11:57:25 AM	Main Vac valve closed
5/3/2012	11:57:25 AM	Bypass valve closed
5/3/2012	11:57:25 AM	Helium valve opened
5/3/2012	11:57:25 AM	Bubbler valve opened
5/3/2012	11:57:25 AM	Helium MFC set to  500.000000
5/3/2012	11:57:25 AM	H2 MFC set to  0.000000
5/3/2012	11:57:25 AM	BCl3 MFC set to  0.000000
5/3/2012	11:57:25 AM	PH3 MFC set to  0.000000
5/3/2012	11:57:25 AM	SiCl4 MFC set to  0.000000
5/3/2012	11:57:25 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:57:25 AM	Tube furnace set to 875
5/3/2012	11:58:55 AM	H2 valve closed
5/3/2012	11:58:55 AM	BCl3 valve closed
5/3/2012	11:58:55 AM	PH3 valve closed
5/3/2012	11:58:55 AM	SiCl4 pre valve closed
5/3/2012	11:58:55 AM	SiCl4 post valve closed
5/3/2012	11:58:55 AM	Main Vac valve closed
5/3/2012	11:58:55 AM	Bypass valve closed
5/3/2012	11:58:55 AM	Helium valve opened
5/3/2012	11:58:55 AM	Bubbler valve opened
5/3/2012	11:58:55 AM	Helium MFC set to  500.000000
5/3/2012	11:58:55 AM	H2 MFC set to  0.000000
5/3/2012	11:58:55 AM	BCl3 MFC set to  0.000000
5/3/2012	11:58:55 AM	PH3 MFC set to  0.000000
5/3/2012	11:58:55 AM	SiCl4 MFC set to  0.000000
5/3/2012	11:58:55 AM	Bypass solenoid MFC set to  0.000000
5/3/2012	11:58:55 AM	Tube furnace set to 850
5/3/2012	12:00:25 PM	H2 valve closed
5/3/2012	12:00:25 PM	BCl3 valve closed
5/3/2012	12:00:25 PM	PH3 valve closed
5/3/2012	12:00:25 PM	SiCl4 pre valve closed
5/3/2012	12:00:25 PM	SiCl4 post valve closed
5/3/2012	12:00:25 PM	Main Vac valve closed
5/3/2012	12:00:25 PM	Bypass valve closed
5/3/2012	12:00:25 PM	Helium valve opened
5/3/2012	12:00:25 PM	Bubbler valve opened
5/3/2012	12:00:25 PM	Helium MFC set to  500.000000
5/3/2012	12:00:25 PM	H2 MFC set to  0.000000
5/3/2012	12:00:25 PM	BCl3 MFC set to  0.000000
5/3/2012	12:00:26 PM	PH3 MFC set to  0.000000
5/3/2012	12:00:26 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:00:26 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:00:26 PM	Tube furnace set to 825
5/3/2012	12:01:56 PM	H2 valve closed
5/3/2012	12:01:56 PM	BCl3 valve closed
5/3/2012	12:01:56 PM	PH3 valve closed
5/3/2012	12:01:56 PM	SiCl4 pre valve closed
5/3/2012	12:01:56 PM	SiCl4 post valve closed
5/3/2012	12:01:56 PM	Main Vac valve closed
5/3/2012	12:01:56 PM	Bypass valve closed
5/3/2012	12:01:56 PM	Helium valve opened
5/3/2012	12:01:56 PM	Bubbler valve opened
5/3/2012	12:01:56 PM	Helium MFC set to  500.000000
5/3/2012	12:01:56 PM	H2 MFC set to  0.000000
5/3/2012	12:01:56 PM	BCl3 MFC set to  0.000000
5/3/2012	12:01:56 PM	PH3 MFC set to  0.000000
5/3/2012	12:01:56 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:01:56 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:01:56 PM	Tube furnace set to 800
5/3/2012	12:03:26 PM	H2 valve closed
5/3/2012	12:03:26 PM	BCl3 valve closed
5/3/2012	12:03:26 PM	PH3 valve closed
5/3/2012	12:03:26 PM	SiCl4 pre valve closed
5/3/2012	12:03:26 PM	SiCl4 post valve closed
5/3/2012	12:03:26 PM	Main Vac valve closed
5/3/2012	12:03:26 PM	Bypass valve closed
5/3/2012	12:03:26 PM	Helium valve opened
5/3/2012	12:03:26 PM	Bubbler valve opened
5/3/2012	12:03:26 PM	Helium MFC set to  500.000000
5/3/2012	12:03:26 PM	H2 MFC set to  0.000000
5/3/2012	12:03:26 PM	BCl3 MFC set to  0.000000
5/3/2012	12:03:26 PM	PH3 MFC set to  0.000000
5/3/2012	12:03:26 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:03:26 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:03:26 PM	Tube furnace set to 0
5/3/2012	12:18:26 PM	Helium valve closed
5/3/2012	12:18:26 PM	H2 valve closed
5/3/2012	12:18:26 PM	BCl3 valve closed
5/3/2012	12:18:26 PM	PH3 valve closed
5/3/2012	12:18:26 PM	SiCl4 pre valve closed
5/3/2012	12:18:26 PM	SiCl4 post valve closed
5/3/2012	12:18:26 PM	Main Vac valve closed
5/3/2012	12:18:26 PM	Bypass valve closed
5/3/2012	12:18:26 PM	Bubbler valve closed
5/3/2012	12:18:26 PM	Helium MFC set to  0.000000
5/3/2012	12:18:26 PM	H2 MFC set to  0.000000
5/3/2012	12:18:26 PM	BCl3 MFC set to  0.000000
5/3/2012	12:18:26 PM	PH3 MFC set to  0.000000
5/3/2012	12:18:26 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:18:26 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:18:26 PM	Tube furnace set to 0
5/3/2012	12:48:26 PM	H2 valve closed
5/3/2012	12:48:26 PM	BCl3 valve closed
5/3/2012	12:48:26 PM	PH3 valve closed
5/3/2012	12:48:26 PM	SiCl4 pre valve closed
5/3/2012	12:48:26 PM	SiCl4 post valve closed
5/3/2012	12:48:26 PM	Main Vac valve closed
5/3/2012	12:48:26 PM	Bypass valve closed
5/3/2012	12:48:26 PM	Bubbler valve closed
5/3/2012	12:48:26 PM	Helium valve opened
5/3/2012	12:48:26 PM	Helium MFC set to  500.000000
5/3/2012	12:48:26 PM	H2 MFC set to  0.000000
5/3/2012	12:48:26 PM	BCl3 MFC set to  0.000000
5/3/2012	12:48:26 PM	PH3 MFC set to  0.000000
5/3/2012	12:48:26 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:48:27 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:48:27 PM	Tube furnace set to 0
5/3/2012	12:48:30 PM	H2 valve closed
5/3/2012	12:48:30 PM	BCl3 valve closed
5/3/2012	12:48:30 PM	PH3 valve closed
5/3/2012	12:48:30 PM	SiCl4 pre valve closed
5/3/2012	12:48:30 PM	SiCl4 post valve closed
5/3/2012	12:48:30 PM	Main Vac valve closed
5/3/2012	12:48:30 PM	Bypass valve closed
5/3/2012	12:48:30 PM	Helium valve opened
5/3/2012	12:48:30 PM	Bubbler valve opened
5/3/2012	12:48:30 PM	Helium MFC set to  500.000000
5/3/2012	12:48:31 PM	H2 MFC set to  0.000000
5/3/2012	12:48:31 PM	BCl3 MFC set to  0.000000
5/3/2012	12:48:31 PM	PH3 MFC set to  0.000000
5/3/2012	12:48:31 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:48:31 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:48:31 PM	Tube furnace set to 0
5/3/2012	12:50:31 PM	Helium valve closed
5/3/2012	12:50:31 PM	H2 valve closed
5/3/2012	12:50:31 PM	BCl3 valve closed
5/3/2012	12:50:31 PM	PH3 valve closed
5/3/2012	12:50:31 PM	SiCl4 pre valve closed
5/3/2012	12:50:31 PM	SiCl4 post valve closed
5/3/2012	12:50:31 PM	Main Vac valve closed
5/3/2012	12:50:31 PM	Bypass valve closed
5/3/2012	12:50:31 PM	Bubbler valve closed
5/3/2012	12:50:31 PM	Helium MFC set to  0.000000
5/3/2012	12:50:31 PM	H2 MFC set to  0.000000
5/3/2012	12:50:31 PM	BCl3 MFC set to  0.000000
5/3/2012	12:50:31 PM	PH3 MFC set to  0.000000
5/3/2012	12:50:31 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:50:31 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:50:31 PM	Tube furnace set to 0
5/3/2012	12:50:32 PM	Helium valve closed
5/3/2012	12:50:32 PM	H2 valve closed
5/3/2012	12:50:32 PM	BCl3 valve closed
5/3/2012	12:50:32 PM	PH3 valve closed
5/3/2012	12:50:32 PM	SiCl4 pre valve closed
5/3/2012	12:50:32 PM	SiCl4 post valve closed
5/3/2012	12:50:32 PM	Main Vac valve closed
5/3/2012	12:50:32 PM	Bubbler valve closed
5/3/2012	12:50:32 PM	Bypass valve opened
5/3/2012	12:50:32 PM	Helium MFC set to  0.000000
5/3/2012	12:50:32 PM	H2 MFC set to  0.000000
5/3/2012	12:50:32 PM	BCl3 MFC set to  0.000000
5/3/2012	12:50:32 PM	PH3 MFC set to  0.000000
5/3/2012	12:50:32 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:50:32 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:50:32 PM	Tube furnace set to 0
5/3/2012	12:51:23 PM	Helium valve closed
5/3/2012	12:51:23 PM	H2 valve closed
5/3/2012	12:51:23 PM	BCl3 valve closed
5/3/2012	12:51:23 PM	PH3 valve closed
5/3/2012	12:51:23 PM	SiCl4 pre valve closed
5/3/2012	12:51:23 PM	SiCl4 post valve closed
5/3/2012	12:51:23 PM	Main Vac valve closed
5/3/2012	12:51:23 PM	Bubbler valve closed
5/3/2012	12:51:23 PM	Bypass valve opened
5/3/2012	12:51:23 PM	Helium MFC set to  0.000000
5/3/2012	12:51:23 PM	H2 MFC set to  0.000000
5/3/2012	12:51:23 PM	BCl3 MFC set to  0.000000
5/3/2012	12:51:23 PM	PH3 MFC set to  0.000000
5/3/2012	12:51:23 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:51:23 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:51:24 PM	Tube furnace set to 0
5/3/2012	12:52:24 PM	Helium valve closed
5/3/2012	12:52:24 PM	H2 valve closed
5/3/2012	12:52:24 PM	BCl3 valve closed
5/3/2012	12:52:24 PM	PH3 valve closed
5/3/2012	12:52:24 PM	SiCl4 pre valve closed
5/3/2012	12:52:24 PM	SiCl4 post valve closed
5/3/2012	12:52:24 PM	Bypass valve closed
5/3/2012	12:52:24 PM	Bubbler valve closed
5/3/2012	12:52:24 PM	Main Vac valve opened
5/3/2012	12:52:24 PM	Helium MFC set to  0.000000
5/3/2012	12:52:24 PM	H2 MFC set to  0.000000
5/3/2012	12:52:24 PM	BCl3 MFC set to  0.000000
5/3/2012	12:52:24 PM	PH3 MFC set to  0.000000
5/3/2012	12:52:24 PM	SiCl4 MFC set to  0.000000
5/3/2012	12:52:24 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	12:52:24 PM	Tube furnace set to 0
5/3/2012	3:32:24 PM	Run finished at 3:32 PM
5/3/2012	3:41:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2012	3:41:42 PM	Recipe started at 3:41 PM
5/3/2012	3:41:42 PM	Helium valve closed
5/3/2012	3:41:42 PM	H2 valve closed
5/3/2012	3:41:42 PM	BCl3 valve closed
5/3/2012	3:41:42 PM	PH3 valve closed
5/3/2012	3:41:42 PM	SiCl4 pre valve closed
5/3/2012	3:41:42 PM	SiCl4 post valve closed
5/3/2012	3:41:42 PM	Main Vac valve closed
5/3/2012	3:41:42 PM	Bypass valve closed
5/3/2012	3:41:42 PM	Bubbler valve closed
5/3/2012	3:41:42 PM	Helium MFC set to  0.000000
5/3/2012	3:41:42 PM	H2 MFC set to  0.000000
5/3/2012	3:41:42 PM	BCl3 MFC set to  0.000000
5/3/2012	3:41:42 PM	PH3 MFC set to  0.000000
5/3/2012	3:41:42 PM	SiCl4 MFC set to  0.000000
5/3/2012	3:41:42 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	3:41:42 PM	Tube furnace set to 0
5/3/2012	3:41:46 PM	H2 valve closed
5/3/2012	3:41:46 PM	BCl3 valve closed
5/3/2012	3:41:46 PM	PH3 valve closed
5/3/2012	3:41:46 PM	SiCl4 pre valve closed
5/3/2012	3:41:46 PM	SiCl4 post valve closed
5/3/2012	3:41:46 PM	Main Vac valve closed
5/3/2012	3:41:46 PM	Bypass valve closed
5/3/2012	3:41:46 PM	Bubbler valve closed
5/3/2012	3:41:46 PM	Helium valve opened
5/3/2012	3:41:46 PM	Helium MFC set to  500.000000
5/3/2012	3:41:46 PM	H2 MFC set to  0.000000
5/3/2012	3:41:46 PM	BCl3 MFC set to  0.000000
5/3/2012	3:41:46 PM	PH3 MFC set to  0.000000
5/3/2012	3:41:46 PM	SiCl4 MFC set to  0.000000
5/3/2012	3:41:46 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	3:41:46 PM	Tube furnace set to 0
5/3/2012	3:42:57 PM	Helium valve closed
5/3/2012	3:42:57 PM	H2 valve closed
5/3/2012	3:42:57 PM	BCl3 valve closed
5/3/2012	3:42:57 PM	PH3 valve closed
5/3/2012	3:42:57 PM	SiCl4 pre valve closed
5/3/2012	3:42:57 PM	SiCl4 post valve closed
5/3/2012	3:42:57 PM	Main Vac valve closed
5/3/2012	3:42:57 PM	Bypass valve closed
5/3/2012	3:42:57 PM	Bubbler valve closed
5/3/2012	3:42:57 PM	Helium MFC set to  0.000000
5/3/2012	3:42:57 PM	H2 MFC set to  0.000000
5/3/2012	3:42:57 PM	BCl3 MFC set to  0.000000
5/3/2012	3:42:57 PM	PH3 MFC set to  0.000000
5/3/2012	3:42:57 PM	SiCl4 MFC set to  0.000000
5/3/2012	3:42:57 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	3:42:57 PM	Tube furnace set to 0
5/3/2012	3:42:58 PM	Run finished at 3:42 PM
5/3/2012	3:42:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2012	3:48:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2012	3:48:28 PM	Recipe started at 3:48 PM
5/3/2012	3:48:28 PM	Helium valve closed
5/3/2012	3:48:28 PM	H2 valve closed
5/3/2012	3:48:28 PM	BCl3 valve closed
5/3/2012	3:48:28 PM	PH3 valve closed
5/3/2012	3:48:28 PM	SiCl4 pre valve closed
5/3/2012	3:48:28 PM	SiCl4 post valve closed
5/3/2012	3:48:28 PM	Main Vac valve closed
5/3/2012	3:48:29 PM	Bubbler valve closed
5/3/2012	3:48:29 PM	Bypass valve opened
5/3/2012	3:48:29 PM	Helium MFC set to  0.000000
5/3/2012	3:48:29 PM	H2 MFC set to  0.000000
5/3/2012	3:48:29 PM	BCl3 MFC set to  0.000000
5/3/2012	3:48:29 PM	PH3 MFC set to  0.000000
5/3/2012	3:48:29 PM	SiCl4 MFC set to  0.000000
5/3/2012	3:48:29 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	3:48:29 PM	Tube furnace set to 0
5/3/2012	3:49:38 PM	Helium valve closed
5/3/2012	3:49:38 PM	H2 valve closed
5/3/2012	3:49:38 PM	BCl3 valve closed
5/3/2012	3:49:38 PM	PH3 valve closed
5/3/2012	3:49:38 PM	SiCl4 pre valve closed
5/3/2012	3:49:38 PM	SiCl4 post valve closed
5/3/2012	3:49:38 PM	Main Vac valve closed
5/3/2012	3:49:38 PM	Bubbler valve closed
5/3/2012	3:49:38 PM	Bypass valve opened
5/3/2012	3:49:38 PM	Helium MFC set to  0.000000
5/3/2012	3:49:38 PM	H2 MFC set to  0.000000
5/3/2012	3:49:38 PM	BCl3 MFC set to  0.000000
5/3/2012	3:49:38 PM	PH3 MFC set to  0.000000
5/3/2012	3:49:38 PM	SiCl4 MFC set to  0.000000
5/3/2012	3:49:38 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	3:49:38 PM	Tube furnace set to 0
5/3/2012	3:50:38 PM	Helium valve closed
5/3/2012	3:50:38 PM	H2 valve closed
5/3/2012	3:50:38 PM	BCl3 valve closed
5/3/2012	3:50:38 PM	PH3 valve closed
5/3/2012	3:50:38 PM	SiCl4 pre valve closed
5/3/2012	3:50:38 PM	SiCl4 post valve closed
5/3/2012	3:50:38 PM	Bypass valve closed
5/3/2012	3:50:38 PM	Bubbler valve closed
5/3/2012	3:50:38 PM	Main Vac valve opened
5/3/2012	3:50:38 PM	Helium MFC set to  0.000000
5/3/2012	3:50:38 PM	H2 MFC set to  0.000000
5/3/2012	3:50:38 PM	BCl3 MFC set to  0.000000
5/3/2012	3:50:38 PM	PH3 MFC set to  0.000000
5/3/2012	3:50:38 PM	SiCl4 MFC set to  0.000000
5/3/2012	3:50:38 PM	Bypass solenoid MFC set to  0.000000
5/3/2012	3:50:38 PM	Tube furnace set to 0
5/3/2012	3:50:39 PM	Run finished at 3:50 PM
5/3/2012	3:50:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
